Pubblicazione in rivista scientifica

Daliento, Santolo, Spirito, Paolo, Gialanella, Lucio, Limata, Benedicta Norman and Romano, Mario (2006) Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon. [Pubblicazione in rivista scientifica]

Conference or Workshop Item

Daliento, Santolo, Spirito, Paolo, Gialanella, Lucio, Romano, Mario and Limata, Benedicta Norman (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.