Pubblicazione in rivista scientifica

Daliento, Santolo and Spirito, Paolo and Gialanella, Lucio and Limata, Benedicta Norman and Romano, Mario (2006) Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon. [Pubblicazione in rivista scientifica]

Contributo a Convegno o Workshop

Daliento, Santolo and Spirito, Paolo and Gialanella, Lucio and Romano, Mario and Limata, Benedicta Norman (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.