Autore/Creatore: SPIRITO, PAOLO

DALIENTO, SANTOLO and SPIRITO, PAOLO and GIALANELLA, LUCIO and LIMATA, BENEDICTA NORMAN and ROMANO, MARIO (2006) Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon. [Pubblicazione su rivista scientifica]

DALIENTO, SANTOLO and SPIRITO, PAOLO and GIALANELLA, LUCIO and ROMANO, MARIO and LIMATA, BENEDICTA NORMAN (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.