Metallic nanowire based electronic devices fabricated by Focused Ion Beam and Dielectrophoresis

Abstract

In this thesis work, devices based on Palladium nanowire array and single Palladium nanowire have been realized and characterized as hydrogen sensors at room temperature. For fabricating nanowire based devices, a grow in place approach has been used. Photolithography and focused ion beam (FIB) have been exploited for depositing electrodes where, by means of an alternate electric field (dielectrophoresis, DEP), it has been possible to drive metallic nanoparticles towards high field gradient. The influence of DEP work conditions, such as field frequency, and electrode patterns onto nanowire morphology and consequently on device response have been evaluate.