Coscia, Ubaldo and Ambrosone, Giuseppina and Maddalena, Pasqualino (2006) Deposition Of Silicon-Carbon Films At Different Substrate Temperatures By PECVD. In: EPVSEC, 4-8 September 2006, Dresda.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Date Deposited: 18 Oct 2010 08:15
Last Modified: 30 Apr 2014 19:41
URI: http://www.fedoa.unina.it/id/eprint/5619

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