Coscia, Ubaldo, Ambrosone, Giuseppina and Maddalena, Pasqualino (2006) Deposition Of Silicon-Carbon Films At Different Substrate Temperatures By PECVD. In: EPVSEC, 4-8 September 2006, Dresda.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Title: Deposition Of Silicon-Carbon Films At Different Substrate Temperatures By PECVD
Creators:
Creators
Email
Coscia, Ubaldo
UNSPECIFIED
Ambrosone, Giuseppina
UNSPECIFIED
Maddalena, Pasqualino
UNSPECIFIED
Autore/i: U. Coscia, G. Ambrosone, P. Maddalena, A. Setaro, S. Santucci, M. Passacantando, M. Tucci
Date: 2006
Number of Pages: 0
Department: Scienze fisiche
Event Title: EPVSEC
Event Location: Dresda
Event Dates: 4-8 September 2006
Publisher: Wip-Renewable Energies
Date: 2006
Page Range: pp. 1775-1778
Number of Pages: 0
Date Deposited: 18 Oct 2010 08:15
Last Modified: 30 Apr 2014 19:41
URI: http://www.fedoa.unina.it/id/eprint/5619

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