Daliento, Santolo, Spirito, Paolo, Gialanella, Lucio, Limata, Benedicta Norman and Romano, Mario (2006) Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon. [Pubblicazione in rivista scientifica]
Full text not available from this repository.| Item Type: | Pubblicazione in rivista scientifica |
|---|---|
| Title: | Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon |
| Creators: | Creators Email Daliento, Santolo UNSPECIFIED Spirito, Paolo UNSPECIFIED Gialanella, Lucio UNSPECIFIED Limata, Benedicta Norman UNSPECIFIED Romano, Mario UNSPECIFIED |
| Autore/i: | S. DALIENTO; MELE L.; P. SPIRITO; GIALANELLA L; LIMATA B.N; ROMANO M |
| Date: | 2006 |
| Number of Pages: | 0 |
| Department: | Scienze fisiche |
| Journal or Publication Title: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS |
| Date: | 2006 |
| Volume: | 253 |
| Page Range: | pp. 90-93 |
| Number of Pages: | 0 |
| Date Deposited: | 20 Oct 2010 08:01 |
| Last Modified: | 30 Apr 2014 19:42 |
| URI: | http://www.fedoa.unina.it/id/eprint/6409 |
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