Daliento, Santolo and Spirito, Paolo and Gialanella, Lucio and Limata, Benedicta Norman and Romano, Mario (2006) Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon. [Pubblicazione in rivista scientifica]

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Item Type: Pubblicazione in rivista scientifica
Title: Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon
Creators:
CreatorsEmail
Daliento, SantoloUNSPECIFIED
Spirito, PaoloUNSPECIFIED
Gialanella, LucioUNSPECIFIED
Limata, Benedicta NormanUNSPECIFIED
Romano, MarioUNSPECIFIED
Autor/s: S. DALIENTO; MELE L.; P. SPIRITO; GIALANELLA L; LIMATA B.N; ROMANO M
Date: 2006
Number of Pages: 0
Department: Scienze fisiche
Journal or Publication Title: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Date: 2006
Volume: 253
Page Range: pp. 90-93
Number of Pages: 0
Date Deposited: 20 Oct 2010 08:01
Last Modified: 30 Apr 2014 19:42
URI: http://www.fedoa.unina.it/id/eprint/6409

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