Esposito, Emilia Maria (2010) Realization and characterization of silicon nitride thin films embedding Si nanoparticles. [Tesi di dottorato] (Unpublished)
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| Item Type: | Tesi di dottorato |
|---|---|
| Resource language: | English |
| Title: | Realization and characterization of silicon nitride thin films embedding Si nanoparticles |
| Creators: | Creators Email Esposito, Emilia Maria em.esposito@gmail.com |
| Date: | 30 November 2010 |
| Number of Pages: | 128 |
| Institution: | Università degli Studi di Napoli Federico II |
| Department: | Scienze fisiche |
| Scuola di dottorato: | Ingegneria industriale |
| Dottorato: | Tecnologie innovative per materiali, sensori ed imaging |
| Ciclo di dottorato: | 23 |
| Coordinatore del Corso di dottorato: | nome email Andreone, Antonello andreone@unina.it |
| Tutor: | nome email Mercaldo, Lucia Vittoria lucia.mercaldo@enea.it |
| Date: | 30 November 2010 |
| Number of Pages: | 128 |
| Keywords: | Si nanoparticles, silicon nitride, quantum confinement, Raman spectroscopy, photoluminescence, PECVD |
| Settori scientifico-disciplinari del MIUR: | Area 02 - Scienze fisiche > FIS/03 - Fisica della materia Area 02 - Scienze fisiche > FIS/01 - Fisica sperimentale Area 09 - Ingegneria industriale e dell'informazione > ING-IND/22 - Scienza e tecnologia dei materiali |
| Additional information: | Istituzione: C. R. ENEA - Portici |
| Date Deposited: | 09 Dec 2010 13:24 |
| Last Modified: | 30 Apr 2014 19:45 |
| URI: | http://www.fedoa.unina.it/id/eprint/8288 |
| DOI: | 10.6092/UNINA/FEDOA/8288 |
Collection description
This thesis concerns the realization and characterization of silicon nitride thin films embedding Si nanoparticles. The objectives are: 1) to investigate convenient fabrication procedures in application perspective, 2) to improve upon the characterization techniques regarding this material class, and 3) to possibly provide a proof of concept study of quantum confinement to support the implementation of new-generation optoelectronic devices (among which, in particular, the all-silicon tandem solar cells). Different fabrication approaches have been followed: a simpler in-situ route by Plasma Enhanced Chemical Vapour Deposition and a procedure involving a post-deposition annealing step. The samples have been characterized through photoluminescence (at different excitation energies and temperatures), extensive Raman spectroscopy, FTIR, optical absorption, and EFTEM. The research activity has been carried out at ENEA - Portici Research Center in the “Photovoltaic Technologies Section” (now “Portici Technical Unit”).
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