Daliento, Santolo and Spirito, Paolo and Gialanella, Lucio and Romano, Mario and Limata, Benedicta Norman (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Date Deposited: 18 Oct 2010 08:15
Last Modified: 30 Apr 2014 19:41
URI: http://www.fedoa.unina.it/id/eprint/5618

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