Daliento, Santolo, Spirito, Paolo, Gialanella, Lucio, Romano, Mario and Limata, Benedicta Norman (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Resource language: | English |
| Title: | Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy |
| Creators: | Creators Email Daliento, Santolo UNSPECIFIED Spirito, Paolo UNSPECIFIED Gialanella, Lucio UNSPECIFIED Romano, Mario UNSPECIFIED Limata, Benedicta Norman UNSPECIFIED |
| Autore/i: | S.Daliento, L.Mele, P.Spirito, L.Gialanella, M.Romano, B.N.Limata, R.Carta, L.Bellemo |
| Date: | 2006 |
| Number of Pages: | 0 |
| Department: | Scienze fisiche |
| Event Title: | ISPSD 06 |
| Event Location: | Napoli |
| Event Dates: | giugno 2006 |
| Date: | 2006 |
| ISBN: | 1-4244-9714-2 |
| Page Range: | pp. 153-156 |
| Number of Pages: | 0 |
| Date Deposited: | 18 Oct 2010 08:15 |
| Last Modified: | 30 Apr 2014 19:41 |
| URI: | http://www.fedoa.unina.it/id/eprint/5618 |
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