Daliento, Santolo and Spirito, Paolo and Gialanella, Lucio and Romano, Mario and Limata, Benedicta Norman (2006) Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy. In: ISPSD 06, giugno 2006, Napoli.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Language: English
Title: Helium implantation in silicon: detailed experimental analysis of resistivity and lifetime profiles as a function of the implantation dose and energy
Creators:
CreatorsEmail
Daliento, SantoloUNSPECIFIED
Spirito, PaoloUNSPECIFIED
Gialanella, LucioUNSPECIFIED
Romano, MarioUNSPECIFIED
Limata, Benedicta NormanUNSPECIFIED
Autor/s: S.Daliento, L.Mele, P.Spirito, L.Gialanella, M.Romano, B.N.Limata, R.Carta, L.Bellemo
Date: 2006
Number of Pages: 0
Department: Scienze fisiche
Event Title: ISPSD 06
Event Location: Napoli
Event Dates: giugno 2006
Date: 2006
ISBN: 1-4244-9714-2
Page Range: pp. 153-156
Number of Pages: 0
Date Deposited: 18 Oct 2010 08:15
Last Modified: 30 Apr 2014 19:41
URI: http://www.fedoa.unina.it/id/eprint/5618

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