Abbate, Giancarlo and Ambrosone, Giuseppina and Coscia, Ubaldo and Marino, Antigone (2010) Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by plasma enhanced chemical vapor deposition. [Pubblicazione in rivista scientifica]

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Item Type: Pubblicazione in rivista scientifica
Title: Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by plasma enhanced chemical vapor deposition
Creators:
CreatorsEmail
Abbate, GiancarloUNSPECIFIED
Ambrosone, GiuseppinaUNSPECIFIED
Coscia, UbaldoUNSPECIFIED
Marino, AntigoneUNSPECIFIED
Autor/s: D. K. Basa, G. Abbate, G. Ambrosone, U. Coscia, A. Marino
Date: 2010
Number of Pages: 0
Department: Scienze fisiche
Journal or Publication Title: JOURNAL OF APPLIED PHYSICS
Date: 2010
Volume: 107
Page Range: pp. 23502-23507
Number of Pages: 0
Date Deposited: 21 Oct 2010 07:39
Last Modified: 30 Apr 2014 19:43
URI: http://www.fedoa.unina.it/id/eprint/7731

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